Sample Cleaning Before and after, Sample Cleaning using Gv10x Downstream Asher! Minimize time and cost, performance is the absolute best decontamination performance of the sample surface.
Downstream Asher for In-situ Specimen & Specimen Chamber Cleaning
Before Cleaning
Before Cleaning
Imaging Conditions
1.2kV Accelerating Voltage
144pA beam current
10minutes scan time
6.08-10-6 Torr chamber pressure
After Cleaning
Imaging Conditions
1.2kV Accelerating Voltage
144pA beam current
6.08-10-6 Torr chamber pressure
Cleaning Conditions
45 Watts
8 minutes (3mins plus 5mins)
7.53-10-4 Torr chamber pressure
After Cleaning
Imaging Conditions
1.2kV Accelerating Voltage
144pA beam current
6.08-10-6 Torr chamber pressure
Cleaning Conditions
50 Watts
13 minutes (total clean time)
7.32-10-4 Torr chamber pressure
Adjacent Area Scans
Imaging Conditions
1.2kV Accelerating Voltage
144pA beam current
Note
After an initial clean time of 3 minutes, only a slight contamination rectangle was visible after scanning for 10 minutes
Adjacent Area Scans
Imaging Conditions
1.2kV Accelerating Voltage
144pA beam current
Note
After a total clean time of 13 minutes, no contamination was visible after scanning for 10 minutes
LUXEL Al-100 nm filter TF111-2868
RF power
Pressure
Plasma source
Cleaning time
100W
0.005mbar
ibss GV10x model P3.3
110minutes
Front side Before low-pressure RF plasma cleaning
Front side After low-pressure RF plasma cleaning
Back side Before low-pressure RF plasma cleaning
Back side After low-pressure RF plasma cleaning
Time evolution of plasma cleaning process
15min
30min
45min
60min
75min
90min
105min
110min
Cleaning of Fermi Al filter TF111-2870 using ibss GV10x plasma source
Front side before plasma cleaning
Front side after plasma cleaning
Back side before plasma cleaning
Back side after plasma cleaning
Cleaning of Fermi Al filter TF111-2894 using ibss GV10x plasma source
Front side before plasma cleaning
Front side after plasma cleaning
Back side before plasma cleaning
Back side after plasma cleaning
Cleaning of Fermi Al filter TF111-2108 using ibss GV10x plasma source
