OUR PRODUCT 1

GALEX Gas Injection System

• FIB·SEM Gas Injector for SEM Deposition and Gas Assisted Etching
• GALEX Gas Injection System with Four SEM & FIB Deposition Precursor:
• 설치의 용이함 및 빠른 start-up
• C, W, Mo, Pt 호환가능
• Re-loadable cartridges
• Self-service precursor exchange
• Multiple precursors
• Desktop/rack-mountable controller, push-button or computerized
  GUI control
• Fail-safe process valves
• Customization gas injector
• UHV-compatible version upon request