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제품소개

기존 서비스 그 이상의 서비스를 제공해드리는 에이온 주식회사를 소개합니다.

Our Product 02

Nanotools GmbH AFM Probes

  • Ultimate
    precision
    극한의 정밀도

  • High density
    diamond
    like carbon

  • Ultimate
    flexibility
    궁극의 유연성

Ultimate
precision

Electron Beam Induced Processing (EBIP)

특허 받은 EBIP(전자 빔 유도 처리 장치)를 사용하여 15년 이상 SPM(주사탐침현미경) 팁을 개발하고 생산한 경험을 통해 나노스케일의
정확도로 최대 50개 제작 매개 변수 제어가 가능합니다.

  • Tip length accuracy better than ± 10% of the nominal tip length
  • Tip shape accuracy better than ± 2 nm
  • Tip apex sharpness down to < 2 nm
  • Tip orientation accuracy better than ± 0.5°
Ultimate
performance

High density diamond-like carbon

실리콘보다 8배 이상 높은 탄성과 내마모성을 가진 고밀도 다이아몬드형 탄소로 이루어진 HDC/DLC 팁을 통해 생산성을 향상시켜 지속적으로 고해상도 측정을 수행 가능하게 합니다

Ultimate
flexibility

Ultimate flexibility

전문성을 바탕으로 고밀도 초정밀 고객 맞춤형 SPM Probes 및 nanoMEMS solutions 제공 가능합니다.

Solutions for industry
  • Extreme Aspect Ratio
  • High performance replacements for FIB silicon AFM tips
  • 8000 nm to 2000 nm long AFM tips for enhanced depth profiling
  • Tilt compensated for extended access to steep features.
  • Conical shape for improved mechanical stability
  • HDC/DLC durability for long-lasting performance

EBD8-600A

  • Chip
  • Cantilever
  • Tip
Part number NT_EBD8-600_v0010
TIP
Material HDC/DLC -
Shape conical -
Tip length / I 8000 nm (6000-8000 nm)
Diameter / d(measured at 1000 nm) 100 nm (80-120 nm)
Diameter / d(measured at 5000 nm) 600 nm (580-620 nm)
Half cone angle / Φ < 3° (AR>10)
Radius/r < 5 nm (<10 nm)
Tilt compensation / Θ 13° (±1°)
Pyramid height / PH 21 ㎛ (18-23 ㎛)
Tip set back/TSB 15 ㎛ (5-25 ㎛)
Cantilever
Material Si -
Shape NT-RTESPA -
Length /L 120 ㎛ (±5 ㎛)
Width/W 30 ㎛ (±2 ㎛)
Thickness/T 4.4 ㎛ (±0.5 ㎛)
Force constant/k 40 Nm (±20 N/m)
Resonance Frequency /f &320 kHz (50 kHz)
Coating
Tip side none -
Back side reflex -
Chip
Length / L_Chip 3400 ㎛ -
Width/W_Chip 1600 ㎛ -
Thickness /T_Chip 315 ㎛ -
Alignment grooves no -

n/a: specification not applicable for this product
Numbers in parentheses: guaranteed range

  • Spike Small and Sharp: MSS
  • Metrology SuperSharp carbon AFM tips for the inspection of very fine high aspect ratio features
  • Down to <8 nm tip width at 50 nm depth
  • Tip apex radius of <2 nm for ultrahigh resolution AFM imaging on HAR features
  • For automated non-contact imaging at 75 kHz or 320 kHz

HDC-40

  • Chip
  • Cantilever
  • Tip
Part number NT_EBD8-600_v0010
TIP
Material HDC/DLC -
Shape conical -
Tip length / I 400 nm (±100 nm)
Diameter / d(measured at 100 nm) 20 nm (±2 nm)
Diameter / d(measured at 3000 nm) 40 nm ±100 nm)
Half cone angle / Φ < 4° (AR>8)
Radius/r 2-3 nm (<5 nm)
Tilt compensation / Θ (±0.5°)
Pyramid height / PH 15 ㎛ (10-15 ㎛)
Tip set back/TSB 15 ㎛ (5-25 ㎛)
Cantilever
Material Si -
Shape NT-RTESPA -
Length /L 120 ㎛ (±5 ㎛)
Width/W 30 ㎛ (±2 ㎛)
Thickness/T 4.4 ㎛ (±0.5 ㎛)
Force constant/k 40 Nm (±20 N/m)
Resonance Frequency /f 320 kHz (50 kHz)
Coating
Tip side none -
Back side reflex -
Chip
Length / L_Chip 3400 ㎛ -
Width/W_Chip 1600 ㎛ -
Thickness /T_Chip 315 ㎛ -
Alignment grooves no -

Biotool high resolution

  • Chip
  • Cantilever
  • Tip
Part numberNT_biotool_v0020
TIP
Material HDC/DLC
Shape conical
Tip length / I n/a
Half cone angle / Φ n/a
Radius/r 2 nm
Tilt compensation / Θ n/a
Pyramid height / PH 7 ㎛
Tip set back/TSB 7 ㎛
Cantilever
Material Quartz
Shape rectangular
Length /L 60 ㎛
Width/W 25 ㎛
Thickness/T 0.4 ㎛
Force constant/k 0.1 Nm
Resonance Frequency /f 50 kHz
Coating
Tip side none
Back side Gold reflex
Chip
Length / L_Chip 3400 ㎛
Width/W_Chip 1600 ㎛
Thickness /T_Chip 315 ㎛
Alignment grooves yes

n/a: specification not applicable for this product
Numbers in parentheses: guaranteed range

Nanotools 소개

Nanotools GmbH는 1997년 독일에서 설립되었으며, nanoMEMS, 나노 스케일의 높은
종횡비, 고밀도 고탄성의 AFM/SPM Probe 생산의 선두주자로서 핵심 역량을 강화하며
사업영역을 지속적으로 확장해 왔습니다.

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