테스트 보고서
Sample Cleaning 전후, GV10x Downloadstream Asher를 사용하여 Sample Cleaning 진행!
시간과 비용은 최소화, 성능은 최강 샘플표면의 완벽한 오염제거 성능을 직접 확인하세요.
Downstream Asher for In-situ Specimen
& Specimen Chamber Cleaning
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Before Cleaning
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Before Cleaning
Imaging Conditions
- 1.2kV Accelerating Voltage
- 144pA beam current
- 10minutes scan time
- 6.08-10-6 Torr chamber pressure
-
After Cleaning
Imaging
Conditions
- 1.2kV Accelerating Voltage
- 144pA beam current
- 6.08-10-6 Torr chamber pressure
Cleaning
Conditions
- 45 Watts
- 8 minutes (3mins plus 5mins)
- 7.53-10-4 Torr chamber pressure
-
After Cleaning
Imaging
Conditions
- 1.2kV Accelerating Voltage
- 144pA beam current
- 6.08-10-6 Torr chamber pressure
Cleaning
Conditions
- 50 Watts
- 13 minutes (total clean time)
- 7.32-10-4 Torr chamber pressure
-
Adjacent Area Scans
Imaging
Conditions
- 1.2kV Accelerating Voltage
- 144pA beam current
Note
- After an initial clean time of 3 minutes, only a slight
contamination rectangle was visible after scanning
for 10 minutes
-
Adjacent Area Scans
Imaging
Conditions
- 1.2kV Accelerating Voltage
- 144pA beam current
Note
- After a total clean time of 13 minutes, no
contamination was visible after scanning for
10 minutes
LUXEL Al-100 nm filter TF111-2868
| RF power |
Pressure |
Plasma source |
Cleaning time |
| 100W |
0.005mbar |
ibss GV10x model P3.3 |
110minutes |
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Front side Before low-pressure RF plasma cleaning
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Front side After low-pressure RF plasma cleaning
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Back side Before low-pressure RF plasma cleaning
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Back side After low-pressure RF plasma cleaning
Time evolution of plasma cleaning process
15min
30min
45min
60min
75min
90min
105min
110min
Cleaning of Fermi Al filter TF111-2870
using ibss GV10x plasma source
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Front side before plasma cleaning
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Front side after plasma cleaning
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Back side before plasma cleaning
-
Back side after plasma cleaning
Cleaning of Fermi Al filter TF111-2894
using ibss GV10x plasma source
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Front side before plasma cleaning
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Front side after plasma cleaning
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Back side before plasma cleaning
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Back side after plasma cleaning
Cleaning of Fermi Al filter TF111-2108
using ibss GV10x plasma source
-
Front side before plasma cleaning
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Front side after plasma cleaning
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Back side before plasma cleaning
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Back side after plasma cleaning
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