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기존 서비스 그 이상의 서비스를 제공해드리는 에이온 주식회사를 소개합니다.

Downstream Asher for In-situ Specimen
& Specimen Chamber Cleaning

  • Before Cleaning

  • Before Cleaning

Imaging Conditions

  • 1.2kV Accelerating Voltage
  • 144pA beam current
  • 10minutes scan time
  • 6.08-10-6 Torr chamber pressure
  • After Cleaning

    Imaging
    Conditions

    • 1.2kV Accelerating Voltage
    • 144pA beam current
    • 6.08-10-6 Torr chamber pressure

    Cleaning
    Conditions

    • 45 Watts
    • 8 minutes (3mins plus 5mins)
    • 7.53-10-4 Torr chamber pressure
  • After Cleaning

    Imaging
    Conditions

    • 1.2kV Accelerating Voltage
    • 144pA beam current
    • 6.08-10-6 Torr chamber pressure

    Cleaning
    Conditions

    • 50 Watts
    • 13 minutes (total clean time)
    • 7.32-10-4 Torr chamber pressure
  • Adjacent Area Scans

    Imaging
    Conditions

    • 1.2kV Accelerating Voltage
    • 144pA beam current

    Note

    • After an initial clean time of 3 minutes, only a slight
      contamination rectangle was visible after scanning
      for 10 minutes
  • Adjacent Area Scans

    Imaging
    Conditions

    • 1.2kV Accelerating Voltage
    • 144pA beam current

    Note

    • After a total clean time of 13 minutes, no
      contamination was visible after scanning for
      10 minutes

LUXEL Al-100 nm filter TF111-2868

RF power Pressure Plasma source Cleaning time
100W 0.005mbar ibss GV10x model P3.3 110minutes
  • Front side Before low-pressure RF plasma cleaning

  • Front side After low-pressure RF plasma cleaning

  • Back side Before low-pressure RF plasma cleaning

  • Back side After low-pressure RF plasma cleaning

Time evolution of plasma cleaning process

  • 15min

  • 30min

  • 45min

  • 60min

  • 75min

  • 90min

  • 105min

  • 110min

Cleaning of Fermi Al filter TF111-2870
using ibss GV10x plasma source

  • Front side before plasma cleaning

  • Front side after plasma cleaning

  • Back side before plasma cleaning

  • Back side after plasma cleaning

Cleaning of Fermi Al filter TF111-2894
using ibss GV10x plasma source

  • Front side before plasma cleaning

  • Front side after plasma cleaning

  • Back side before plasma cleaning

  • Back side after plasma cleaning

Cleaning of Fermi Al filter TF111-2108
using ibss GV10x plasma source

  • Front side before plasma cleaning

  • Front side after plasma cleaning

  • Back side before plasma cleaning

  • Back side after plasma cleaning

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